Molecular beam deposition of Al2O3 on p-Ge(001)/Ge0.95Sn0.05 heterostructure and impact of a Ge-cap interfacial layer

Merckling, ClementClementMercklingSun, XiaoXiaoSunShimura, Y.Y.ShimuraFranquet, AlexisAlexisFranquetVincent, BenjaminBenjaminVincentTakeuchi, S.S.TakeuchiVandervorst, WilfriedWilfriedVandervorstNakastuka, O.O.NakastukaZaima, S.S.ZaimaLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-192021-10-1920110003-6951https://imec-publications.be/handle/20.500.12860/19422Molecular beam deposition of Al2O3 on p-Ge(001)/Ge0.95Sn0.05 heterostructure and impact of a Ge-cap interfacial layerJournal article