A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped silicon

De Gryse, O.O.De GryseVanhellemont, J.J.VanhellemontClauws, P.P.ClauwsLebedev, O.O.LebedevVan Landuyt, J.J.Van LanduytSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7408A novel approach to analyse FTIR spectra of precipitates in moderately and heavily doped siliconJournal article