Xu, KaidongKaidongXuPichler, StefanStefanPichlerWostyn, KurtKurtWostynCado, GwenaelleGwenaelleCadoGale, GlennGlennGaleDalmer, MichaelMichaelDalmerSpringer, ClementClementSpringerMertens, PaulPaulMertensBearda, TwanTwanBeardaGaulhofer, ErnstErnstGaulhoferChen, DavidDavidChen2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14807Removal of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performanceOral presentation