Surdeanu, RaduRaduSurdeanuPawlak, BartekBartekPawlakLindsay, RichardRichardLindsayVan Dal, MarkMarkVan DalDoornbos, GerbenGerbenDoornbosDachs, CharlesCharlesDachsPonomarev, YouriYouriPonomarevLoo, JosineJosineLooHenson, KirklenKirklenHensonVerheijen, M.M.VerheijenKaiser, M.M.KaiserPagès, XavierXavierPagèsJurczak, GosiaGosiaJurczakStolk, PeterPeterStolk2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8196Pre-amorphization and co-implantation suitability for advanced PMOS devices integrationProceedings paper