BARC process optimatization for hyper NA tools and influence of polarization on CD swing and standing waves

Op de Beeck, MaaikeMaaikeOp de BeeckHermans, JanJanHermansFoubert, PhilippePhilippeFoubertWiaux, VincentVincentWiauxHendrickx, EricEricHendrickx2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10961BARC process optimatization for hyper NA tools and influence of polarization on CD swing and standing wavesOral presentation