Low thermal budget Si epitaxy: an overview study of the substrate/epi interface in a number of common epitaxial growth systems

Caymax, MattyMattyCaymaxVescan, L.L.VescanWerner, K.K.WernerBensahel, D.D.BensahelGravensteijn, D.D.GravensteijnSzendro, I.I.Szendro2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1112Low thermal budget Si epitaxy: an overview study of the substrate/epi interface in a number of common epitaxial growth systemsProceedings paper