Post-ion beam induced degradation of copper layers in transmission electron microscopy specimens

Seidel, FelixFelixSeidelRichard, OlivierOlivierRichardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-2220150268-1242https://imec-publications.be/handle/20.500.12860/25884Post-ion beam induced degradation of copper layers in transmission electron microscopy specimensJournal articlehttp://iopscience.iop.org/article/10.1088/0268-1242/30/11/114016/meta