Binary modeling method to check the sub-resolution assist features (SRAFs) printability

Li, JianliangJianliangLiGao, WeiminWeiminGaoFan, YongfaYongfaFanXue, JingJingXueYan, QiliangQiliangYanLucas, KevinKevinLucasDe Bisschop, PeterPeterDe BisschopMelvin III, Lawrence S.Lawrence S.Melvin III2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21013Binary modeling method to check the sub-resolution assist features (SRAFs) printabilityProceedings paper