El Otell, ZiadZiadEl OtellRingk, AndreasAndreasRingkKolb, TristanTristanKolbNeuber, ChristianChristianNeuberHaensel, LeanderLeanderHaenselde Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-222021-10-222015-03https://imec-publications.be/handle/20.500.12860/25250Molecular glass resist performance for nano-pattern transferProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2209856