Topside release of atomic force microscopy probes with molded diamond tips

Fouchier, MarcMarcFouchierEyben, PierrePierreEybenJamieson, GeraldineGeraldineJamiesonVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162005-03https://imec-publications.be/handle/20.500.12860/10459Topside release of atomic force microscopy probes with molded diamond tipsJournal article