Intergate dielectric engineering towards large P/E window planar NAND flash

Breuil, LaurentLaurentBreuilLisoni, JuditJuditLisoniBlomme, PieterPieterBlommeTan, Chi LimChi LimTanVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-2220150018-9383https://imec-publications.be/handle/20.500.12860/25018Intergate dielectric engineering towards large P/E window planar NAND flashJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7073568