Zhang, XunyuanXunyuanZhangGillot, ChristopheChristopheGillotZhao, LarryLarryZhaoRyan, ToddToddRyanWu, ChenChenWu2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26244The impact of ALD TaN barrier processes on different BEOL utra low-k dielectricsMeeting abstract