Mitigation of UV-induced propagation loss in PECVD slicon nitride photonic waveguides

Neutens, PieterPieterNeutensRutowska, MonikaMonikaRutowskaVan Roy, WimWimVan RoyJansen, RoelofRoelofJansenBuja, FedericoFedericoBujaVan Dorpe, PolPolVan Dorpe2021-10-262021-10-2620182330-4022https://imec-publications.be/handle/20.500.12860/31410Mitigation of UV-induced propagation loss in PECVD slicon nitride photonic waveguidesJournal articlehttps://pubs.acs.org/doi/abs/10.1021/acsphotonics.8b00014