Process simplification and improvement of rear side of IBC cells by means of PECVD SiOx and epitaxy

Li, YuandongYuandongLiRecaman Payo, MariaMariaRecaman PayoZielinski, BartoszBartoszZielinskiDebucquoy, MaartenMaartenDebucquoyPoortmans, JefJefPoortmans2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25558Process simplification and improvement of rear side of IBC cells by means of PECVD SiOx and epitaxyProceedings paperhttp://www.eupvsec-proceedings.com/proceedings?paper=34761