Solid phase epitaxy of amorphous Ge films deposited by PECVD

Ma, QuanbaoQuanbaoMaLieten, RubenRubenLietenLeys, MaartenMaartenLeysDegroote, StefanStefanDegrooteGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-192021-10-1920110022-0248https://imec-publications.be/handle/20.500.12860/19350Solid phase epitaxy of amorphous Ge films deposited by PECVDJournal article