Channeled ion beam synthesis: a new technique to form epitaxial rare-earth silicides with high quality

Wu, Ming FangMing FangWuVantomme, AndreAndreVantommePattyn, HugoHugoPattynLangouche, H.H.LangoucheBender, HugoHugoBender2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1669Channeled ion beam synthesis: a new technique to form epitaxial rare-earth silicides with high qualityOral presentation