Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing

Kocaay, DenizDenizKocaayRoussel, PhilippePhilippeRousselCroes, KristofKristofCroesCiofi, IvanIvanCiofiLesniewska, AlicjaAlicjaLesniewskaDe Wolf, IngridIngridDe Wolf2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31065Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacingProceedings paperhttps://ieeexplore.ieee.org/document/8353670/