Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric

Abell, ThomasThomasAbellIacopi, FrancescaFrancescaIacopiProkopowicz, GregGregProkopowiczSun, BradBradSunMazurenko, AlexAlexMazurenkoTravaly, YoussefYoussefTravalyBaklanov, MikhaïlMikhaïlBaklanovJonas, AlainAlainJonasSullivan, ChrisChrisSullivanBrongersma, SywertSywertBrongersmaLiou, Huey-ChiangHuey-ChiangLiouTower, JosuaJosuaTowerGostein, MichaelMichaelGosteinGallagher, MikeMikeGallagherCalvert, JeffJeffCalvertMoinpour, MansourMansourMoinpourMaex, KarenKarenMaex2021-10-162021-10-162005-01https://imec-publications.be/handle/20.500.12860/9992Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectricProceedings paper