Exploring alternative metals to Cu and W for interconnects applications using automated first-principles simulations

Sankaran, KiroubanandKiroubanandSankaranClima, SergiuSergiuClimaMees, MaartenMaartenMeesPourtois, GeoffreyGeoffreyPourtois2021-10-222021-10-2220142162-8769https://imec-publications.be/handle/20.500.12860/24477Exploring alternative metals to Cu and W for interconnects applications using automated first-principles simulationsJournal articlehttp://jss.ecsdl.org/cgi/content/abstract/4/1/N3127