Van Elshocht, SvenSvenVan ElshochtHardy, AnAnHardyAdelmann, ChristophChristophAdelmannCaymax, MattyMattyCaymaxConard, ThierryThierryConardFranquet, AlexisAlexisFranquetRichard, OlivierOlivierRichardVan Bael, MarliesMarliesVan BaelMullens, J.J.MullensDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13048Screening of high-k layers in MIS and MIM capacitors using aqueous chemical solution depositionProceedings paper