John, JoachimJoachimJohnMalinowski, PawelPawelMalinowskiAparicio, PatriciaPatriciaAparicioHellings, GeertGeertHellingsLorenz, AnneAnneLorenzGermain, MarianneMarianneGermainSemond, F.F.SemondDuboz, J.-Y.J.-Y.DubozBenmoussa, A.A.BenmoussaHochedez, J.-F.J.-F.HochedezKroth, U.U.KrothRichter, M.M.Richter2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12365AlxGa1-xN focal plane arrays for imaging applications in the extreme ultraviolet (EUV) wavelength rangeProceedings paper