Dellaert, DriesDriesDellaertDoutreloigne, JanJanDoutreloigne2021-10-222021-10-2220150013-5194https://imec-publications.be/handle/20.500.12860/25185Compact thermally actuated latching MEMS switch with large contact forceJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7006862