Total reflection X-ray fluorescence spectrometry for the introduction of novel materials in clean room production environments

Hellin, DavidDavidHellinDe Gendt, StefanStefanDe GendtRip, JensJensRipVinckier, ChrisChrisVinckier2021-10-162021-10-162005-12https://imec-publications.be/handle/20.500.12860/10561Total reflection X-ray fluorescence spectrometry for the introduction of novel materials in clean room production environmentsJournal article