Zhao, Q.T.Q.T.ZhaoBuca, D.D.BucaFeste, S.S.FesteGoryll, M.M.GoryllLoo, RogerRogerLooReiche, M.M.ReicheMantl, S.S.Mantl2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13270Fabrication and characterization of strained Si-on-insulator (sSOI)Proceedings paper