XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers

Conard, ThierryThierryConardDe Witte, HildeHildeDe WitteVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymaxLoo, RogerRogerLooVerheyen, P.P.VerheyenGijbels, RenaatRenaatGijbels2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2459XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layersOral presentation