Junction photovoltage (JPV) techniques for ultra-shallow junction characterization

Faifer, V.N.V.N.FaiferCurrent, M.I.M.I.CurrentSchroder, D.K.D.K.SchroderClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12145Junction photovoltage (JPV) techniques for ultra-shallow junction characterizationProceedings paper