An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices

Hong, Eun KeeEun KeeHongDemuynck, StevenStevenDemuynckLe, Quoc ToanQuoc ToanLeBaklanov, MikhaïlMikhaïlBaklanovCarbonell, LaureLaureCarbonellVan Hove, MarleenMarleenVan HoveMeynen, HermanHermanMeynen2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12304An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devicesJournal article