Implementation of templated DSA for via layer patterning at the 7 nm node

Gronheid, RoelRoelGronheidDoise, JanJanDoiseBekaert, JoostJoostBekaertChan, BTBTChanKarageorgos, IoannisIoannisKarageorgosRyckaert, JulienJulienRyckaertVandenberghe, GeertGeertVandenbergheCao, YiYiCaoLin, G.G.LinSomervell, MarkMarkSomervellFenger, GermainGermainFengerFuchimoto, DaisukeDaisukeFuchimoto2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25340Implementation of templated DSA for via layer patterning at the 7 nm nodeProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210730