Zhao, ChaoChaoZhaoHeeg, T.T.HeegWagner, M.M.WagnerSchubert, J.J.SchubertWitters, ThomasThomasWittersBrijs, BertBertBrijsBender, HugoHugoBenderRichard, OlivierOlivierRichardAfanasiev, ValeriValeriAfanasievHoussa, MichelMichelHoussaCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11607Rare-earth metal scandate high-k layers: promises and problemsMeeting abstract