Marsik, PremyslPremyslMarsikVerdonck, PatrickPatrickVerdonckSchneider, DieterDieterSchneiderDe Roest, DavidDavidDe RoestKaneko, ShinyaShinyaKanekoBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-1720081610-1634https://imec-publications.be/handle/20.500.12860/14127Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric filmsJournal article