Area-selective deposition by a combination of organic film passivation and atomic layer deposition

Pasquali, MattiaMattiaPasqualiDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArmini2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33751Area-selective deposition by a combination of organic film passivation and atomic layer depositionMeeting abstracthttp://ma.ecsdl.org/content/MA2019-02/24/1136.abstract