Multi-scale modeling of direct copper plating on resistive non-copper substrates

Yang, LiuLiuYangRadisic, AlexAlexRadisicNagar, MagiMagiNagarDeconinck, JohanJohanDeconinckLeunissen, PeterPeterLeunissenVereecken, PhilippePhilippeVereeckenWest, AlanAlanWest2021-10-202021-10-202012-10https://imec-publications.be/handle/20.500.12860/21874Multi-scale modeling of direct copper plating on resistive non-copper substratesMeeting abstracthttp://www.ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=MAECES001202000034002738000001&idtype=cvips&gifs=yes