Kwon, HyukyunHyukyunKwonHung, JoeyJoeyHungUrbanowicz, Adam MichalAdam MichalUrbanowiczUrenski, RonenRonenUrenskiTurovets, IgorIgorTurovetsGer, AvronAvronGerTseng, Szu-WeiSzu-WeiTsengSaib, MohamedMohamedSaibBogdanowicz, JanuszJanuszBogdanowiczMelhem, StephanieStephanieMelhemZhou, DaisyDaisyZhouSiew, Yong KongYong KongSiewBasu, DebashishDebashishBasuCharley, Anne-LaureAnne-LaureCharleyReifsnider, JasonJasonReifsniderHoriguchi, NaotoNaotoHoriguchiLeray, PhilippePhilippeLeray2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300004https://imec-publications.be/handle/20.500.12860/45966Critical In-Line OCD Metrology for CFET ManufacturingProceedings paper10.1117/12.3051718978-1-5106-8639-7WOS:001514426300004QUANTUM CONFINEMENT