Electrical performance and reliability aspects of strain engineered deep submicron CMOS technologies

Claeys, CorCorClaeysEneman, GeertGeertEnemanBargallo Gonzalez, MireiaMireiaBargallo GonzalezPut, SofieSofiePutSimoen, EddyEddySimoen2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11875Electrical performance and reliability aspects of strain engineered deep submicron CMOS technologiesProceedings paper