GEMINI:results and conclusions of a 4-year strategic R&D program on MEMS

Witvrouw, AnnAnnWitvrouw2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20156GEMINI:results and conclusions of a 4-year strategic R&D program on MEMSOral presentationhttp://www.europractice-ic.com/wordpress_LF/wp-content/uploads/2011/05/2.Ann-Witvrouw.pdf