Optimisation of a plasma scrubber in the exhaust stream of a W-CVD tool

Van Hoornick, NausikaaNausikaaVan HoornickVan Hoeymissen, JanJanVan HoeymissenHeyns, MarcMarcHeyns2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3932Optimisation of a plasma scrubber in the exhaust stream of a W-CVD toolProceedings paper