Investigations of capacitively-coupled plasmas by electrostatic probe technique

Cirino, GiuseppeGiuseppeCirinoCastro, RaulRaulCastroPisani, MarceloMarceloPisaniVerdonck, PatrickPatrickVerdonckMansano, RonaldoRonaldoMansanoMassi, MarcosMarcosMassiPessoa, RodrigoRodrigoPessoaBarea, LuisLuisBareaBrahim, TayebTayebBrahimMaciel, HomeroHomeroMaciel2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25083Investigations of capacitively-coupled plasmas by electrostatic probe techniqueProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7298131