Schulze, AndreasAndreasSchulzeProkhodtseva, AnnaAnnaProkhodtsevaVystavel, TomasTomasVystavelGachet, DavidDavidGachetBerney, JeanJeanBerneyLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29403Seeing the invisible: metrology for extended defects in beyond-silicon semiconductor device structuresMeeting abstracthttps://www.nist.gov/pml/engineering-physics-division/2017-fcmn-presentations