Smart neuroprobes with disposable micromachined shank protection defined at wafer level

Andrei, AlexandruAlexandruAndreiMora Lopez, CarolinaCarolinaMora LopezSoussan, PhilippePhilippeSoussan2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/21977Smart neuroprobes with disposable micromachined shank protection defined at wafer levelProceedings paperhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6698637&tag=1