Two-dimensional dopant profiling using scanning probe microscopy

Duhayon, NatasjaNatasjaDuhayonEyben, PierrePierreEybenXu, MingweiMingweiXuFouchier, MarcMarcFouchierAlvarez, DavidDavidAlvarezClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6294Two-dimensional dopant profiling using scanning probe microscopyOral presentation