Benchmarking SOI and bulk FinFET alternatives for PLANAR CMOS scaling succession

Chiarella, ThomasThomasChiarellaWitters, LiesbethLiesbethWittersMercha, AbdelkarimAbdelkarimMerchaKerner, ChristophChristophKernerRakowski, MichalMichalRakowskiOrtolland, ClaudeClaudeOrtollandRagnarsson, Lars-AkeLars-AkeRagnarssonParvais, BertrandBertrandParvaisDe Keersgieter, AnAnDe KeersgieterKubicek, StefanStefanKubicekRedolfi, AugustoAugustoRedolfiVrancken, ChristaChristaVranckenBrus, StephanStephanBrusLauwers, AnneAnneLauwersAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-1820100038-1101https://imec-publications.be/handle/20.500.12860/16858Benchmarking SOI and bulk FinFET alternatives for PLANAR CMOS scaling successionJournal articlehttp://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TY5-5045DW2-2&_user=799533&_coverDate=05%2F20%2F2010&_rdoc=1&_fmt=hig