Metal-organic framework ZIF-8 films as low-k dielectrics in microelectronics

Eslava, SalvaSalvaEslavaZhang, LipingLipingZhangVanstreels, KrisKrisVanstreelsBaklanov, MikhaïlMikhaïlBaklanovSaiz, E.E.Saiz2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20659Metal-organic framework ZIF-8 films as low-k dielectrics in microelectronicsMeeting abstract