Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS

Lenci, SilviaSilviaLenciPieri, FrancescoFrancescoPieriHaspeslagh, LucLucHaspeslaghDe Coster, JeroenJeroenDe CosterDecoutere, StefaanStefaanDecoutereMaestre Caro, ArantxaArantxaMaestre CaroArmini, SilviaSilviaArminiWitvrouw, AnnAnnWitvrouw2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19270Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOSProceedings paper