Influence of the tip field, laser, pole and zone lines on the quantification of GaN/AlGaN heterostructures

Morris, RichardRichardMorrisCuduvally, RamyaRamyaCuduvallyMelkonyan, DavitDavitMelkonyanZhao, MingMingZhaovan der Heide, PaulPaulvan der HeideVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31375Influence of the tip field, laser, pole and zone lines on the quantification of GaN/AlGaN heterostructuresProceedings paper