Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy

Hardy, AnAnHardyAdelmann, ChristophChristophAdelmannVan Elshocht, SvenSvenVan ElshochtVan den Rul, HeidiHeidiVan den RulVan Bael, MarliesMarliesVan BaelDe Gendt, StefanStefanDe GendtD'Olieslaeger, MarcMarcD'OlieslaegerHeyns, MarcMarcHeynsKittl, JorgeJorgeKittlMullens, JanJanMullens2021-10-172021-10-1720090169-4332https://imec-publications.be/handle/20.500.12860/15435Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopyJournal article