Blank defect coverage budget for 16nm half-pitch single EUV exposure

Jonckheere, RikRikJonckheereYamane, TakeshiTakeshiYamaneMorikawa, YasutakaYasutakaMorikawaKamo, TakashiTakashiKamo2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30975Blank defect coverage budget for 16nm half-pitch single EUV exposureProceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2502792