On the properties of the gate and substrate current after soft breakdown in ultrathin oxide layers

Crupi, FeliceFeliceCrupiDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenNigam, TanyaTanyaNigamMaes, HermanHermanMaes2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2468On the properties of the gate and substrate current after soft breakdown in ultrathin oxide layersJournal article