Phung, QuanQuanPhungPourtois, GeoffreyGeoffreyPourtoisSwerts, JohanJohanSwertsPierloot, KristineKristinePierlootDelabie, AnneliesAnneliesDelabie2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24387Atomic layer deposition of Ruthenium: a theoretical insightMeeting abstract