Popov, I.I.PopovVan Calster, AndreAndreVan CalsterDe Baets, JohanJohanDe BaetsDe Pauw, HerbertHerbertDe Pauw2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4670Implementation of the system of experiment design and taboo search into SiON thin film technologyOral presentation