Detavernier, C.C.DetavernierRuttens, GerlindeGerlindeRuttensVan Meirhaeghe, R.R.Van MeirhaegheMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5246The influence of TiN on the thermal stability of CoSi2Oral presentation